This dissertation presents the development of a new experimental device for low pressure inductively coupled cold plasma sample processing. The device enables monitoring and characterization of the process of cold plasma interactions with the surface of the sample. Primary method of characterization is optical emission spectroscopy. Spectral characteristics of plasma are spatially and temporally resolved using miniature spectrometers. Spectral characterization of plasma is compared with measurements of the concentration of atoms with catalytic probes. The measured parameters are used to optimize the process of interaction between the cold plasma and the sample, and special attention is focused on the sample influence on plasma. Investigations included spatially resolved spectroscopy of oxygen, water vapour and hydrogen plasmas. Methane plasma and the deposition of amorphous carbon films and its subsequent removal by oxygen plasma was investigated by optical emission spectroscopy and pirometry. Numerous materials were introduced into various plasmas. These include: ammonia plasma and its effect on sodium hyaluronate (effects on the samples were analysed by XPS). Also, characteristics of oxygen plasma during treatment of polymer graphite composite were monitored by optical emission spectroscopy. Investigation of dental posts modification in hydrogen plasma was performed, where similar effect to classical methods in their pretreatment was achieved. Various polymers (PP, PVC, PTFE and many other) were monitored during plasma treatment by oxygen, hydrogen and argon plasmas. Oxygen plasma was also used in the treatment and modification of surface characteristics of cotton.