Time-of-flight Elastic Recoil Detection Analysis (TOF-ERDA) is a spectroscopic method developed for measuring depth profiles and concentrations of elements in the unknown sample. Heavy ions (like Cl, I, Au..) with energies of 1 MeV/A are used for recoiling atoms from the target. Energy and time of flight of the recoiled atoms are measured in coincidence which enables us to separate all elements by energy and mass. Time/energy spectra are converted to depth profiles using known relation of energy loss by unit of length of the ions in the sample (stopping power). In comparison to conventional ERDA with a stopping foil in TOF-ERDA all elements can be separated and analyzed in a single measurement. Because of the high stopping power of the heavy ions depth resolution of few nm at the surface can be achieved for C, N and O. TOF-ERDA spectrometer is constructed and modification of foils is performed in order to make it suitable for light element analysis (hydrogen isotopes). Expected enhancement in light element detection by factor of 4 is achieved. Also, in order to perform kinematic correction and improve surface depth resolution (up to 1 nm), a position sensitive detector is constructed and installed at the TOF-ERDA spectrometer. Such kinematic correction improves surface time/depth resolution by ~20%. However, much higher improvements could be expected for larger solid angles of TOF system due to the fact that the kinematic broadening in that case is dominant contribution to the surface time resolution.