prikaz prve stranice dokumenta On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films
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Scientific paper - Original scientific paper
On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films
Fizika A, 15 (2006), 1; 35-50. urn:nbn:hr:217:428918
Đerđ, Igor; Tonejc, Anđelka; Tonejc, Antun; Radić, Nikola

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Đerđ, I., Tonejc, A., Tonejc, A. & Radić, N. (2006). On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films. Fizika A, 15. (1), 35-50. Retrieved from https://urn.nsk.hr/urn:nbn:hr:217:428918

Đerđ, Igor, et al. "On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films." Fizika A, vol. 15, no. 1, 2006, pp. 35-50. https://urn.nsk.hr/urn:nbn:hr:217:428918

Đerđ, Igor, Anđelka Tonejc, Antun Tonejc and Nikola Radić. "On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films." Fizika A 15, no. 1 (2006): 35-50. https://urn.nsk.hr/urn:nbn:hr:217:428918

Đerđ, I., et al. (2006) 'On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films', Fizika A, 15(1), pp. 35-50. Available at: https://urn.nsk.hr/urn:nbn:hr:217:428918 (Accessed 08 March 2025)

Đerđ I, Tonejc A, Tonejc A, Radić N. On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films. Fizika A [Internet]. 2006 [cited 2025 March 08];15(1):35-50. Available at: https://urn.nsk.hr/urn:nbn:hr:217:428918

I. Đerđ, A. Tonejc, A. Tonejc and N. Radić, "On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films", Fizika A, vol. 15, no. 1, pp. 35-50, 2006. [Online]. Available at: https://urn.nsk.hr/urn:nbn:hr:217:428918. [Accessed: 08 March 2025]

Metadata
Title (english)On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films
AuthorIgor Đerđ
AuthorAnđelka Tonejc
AuthorAntun Tonejc
AuthorNikola Radić
Author's institutionUniversity of Zagreb
Faculty of Science
(Department of Physics)
Scientific / art field,
discipline and subdiscipline		NATURAL SCIENCES
Physics
Abstract (english)
Different methods of X-ray diffraction line profile analysis (XRDLPA) are used to study microstructural parameters such as crystallite size (diffracted domain size), microstrain and texture in tungsten thin films deposited on glass by DC magnetron sputtering at different substrate temperatures and at different working-gas pressures. The whole-pattern analysis within the Rietveld method, the "single-line" method and "double Voigt" method (equivalent to the Warren-Averbach method) are applied and mutually compared. In addition, the results obtained by the Scherrer method are also discussed. The line broadening has been found to be isotropic, supporting the reliability of usage of the Rietveld method in the size-microstrain extraction.
Keywords (english)
Languageenglish
Publication typeScientific paper - Original scientific paper
Publication statusPublished
Peer reviewPeer review
Publication versionPublished version
Journal titleFizika A
Numberingvol. 15, no. 1, pp. 35-50
p-ISSN1330-0008
URN:NBNurn:nbn:hr:217:428918
Publication2006
Document URLhttp://fizika.hfd.hr/fizika_a/av06/a15p035.htm
Type of resourceText
Access conditionsOpen access
Terms of useLicence In copyright icon
Created on2019-10-15 15:53:13