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master's thesis
Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu
Split: University of Split, University of Split, Faculty of science, 2019. urn:nbn:hr:166:374113
Dujić, Tomislav
University of Split
Faculty of Science
Department of Physics

Institutional repository: Repository of Faculty of Science

Cite this document

Dujić, T. (2019). Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu (Master's thesis). Split: University of Split, Faculty of Science. Retrieved from https://urn.nsk.hr/urn:nbn:hr:166:374113

Dujić, Tomislav. "Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu." Master's thesis, University of Split, Faculty of Science, 2019. https://urn.nsk.hr/urn:nbn:hr:166:374113

Dujić, Tomislav. "Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu." Master's thesis, University of Split, Faculty of Science, 2019. https://urn.nsk.hr/urn:nbn:hr:166:374113

Dujić, T. (2019). 'Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu', Master's thesis, University of Split, Faculty of Science, accessed 30 November 2024, https://urn.nsk.hr/urn:nbn:hr:166:374113

Dujić T. Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu [Master's thesis]. Split: University of Split, Faculty of Science; 2019 [cited 2024 November 30] Available at: https://urn.nsk.hr/urn:nbn:hr:166:374113

T. Dujić, "Optimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu", Master's thesis, University of Split, Faculty of Science, Split, 2019. Available at: https://urn.nsk.hr/urn:nbn:hr:166:374113

Metadata
TitleOptimizacija parametara za rast srebrenih mikro- i nano-grozdova na silicijevom supstratu
Title (english)Parameter optimization for the growth of silver micro- and nano-clusters on silicon substrate
AuthorTomislav Dujić
MentorAnte Bilušić (mentor)
Committee memberAnte Bilušić (predsjednik povjerenstva)
Committee memberIvana Weber (član povjerenstva)
Committee memberLucija Krce (član povjerenstva)
GranterUniversity of Split
Faculty of Science
(Department of Physics)
Split
Defense date and country2019-11-19, Croatia
Scientific / art field,
discipline and subdiscipline		NATURAL SCIENCES
Physics
Abstract
Metalne nanočestice zbog svojih osobina od iznimne su važnosti u širokom području znanosti. Pri tome su posebno zanimljive nanočestice plemenitih metala zbog znatno boljih optičkih i električkih osobina u odnosu na ostale metale. U ovome radu proučava se utjecaj depozicijskih parametara i temperature zagrijavanja na sintezu srebrenih nanogrozdova iz tankih filmova dobivenih DC magnetronskim rasprašenjem na supstratu od silicija i silicija sa tankim slojem \(Al_2O_3\) nanesenog metodom depozicije atomskih slojeva. Za uzorke sa silicijem kao supstratom istraživao se utjecaj različitih temperatura zagrijavanja na raspodjelu veličina nastalih nanočestica, te na njihovu geometrijsku raspodjelu. Pokazalo se da s povećanjem temperature geometrija nanočestica postaje pravilnija, dok se veličina istih povećava. Za uzorke sa slojem \(Al_2O_3\) uspoređivao se utjecaj depozicijskih parametara, točnije debljine stvorenog filma na veličine nanogrozdova. Uzorci su nakon depozicije zagrijavani na dvije temperature. Pokazalo se da površina od \(Al_2O_3\) pogoduje rastu grozdova, što kao posljedicu ima da se gotovo sav materijal filmova skuplja u veće strukture, dok od ostatka materijala na površini supstrata preostaju nanogrozdovi većinom promjera do 30 nm.
Abstract (english)
Metallic nanoparticles, noble ones in particular, are of significant interest in a wide field of scientific studies because of their unique optical and electrical properties. In this thesis the influence of deposition parameters and annealing temperature in the formation of silver nanoparticles from thin silver films deposited by DC magnetron sputtering on silicon substrates and silicon substrates with a ALD layer of \(Al_2O_3\) is studied. The influence of different annealig temperatures on the size distribution of silver nanoparticles was studied on the silicon substrates. It was shown that with increasing annealing temperature the geometry of the nanoparticles became more regular,but also that the size of the nanoparticles increased. For the substrates with the layer of \(Al_2O_3\) the influence of the deposition parameters, specifically the thickness of the sputtered film on the size distribution of nanoparticles was compared. Afterdeposition, the substrates were annealed at two differenttemperatures. It was shownthat the layer of \(Al_2O_3\) has a positive influence of cluster growth, which resulted in the formation of large clusters containing most of the film material. The rest of the material was regularly distributed on the remaining surface in the form of small nanoparticles the size of up to 30 nm.
Keywords
Keywords (english)
Languagecroatian
URN:NBNurn:nbn:hr:166:374113
Study programmeTitle: Engineering Physics; specializations in: major in Thermodynamic systems, major in Mechanical Systems
Course: major in Mechanical Systems
Study programme type: university
Study level: graduate
Academic / professional title: magistar/magistra fizike (magistar/magistra fizike)
Type of resourceText
File originBorn digital
Access conditionsAccess restricted to students and staff of home institution
Terms of useLicence In copyright icon
Created on2019-11-22 09:30:00