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undergraduate thesis
Primjena elipsometrije u znanosti i tehnologiji
Zagreb: University of Zagreb, Faculty of Chemical Engineering and Technology, 2021. urn:nbn:hr:149:178431
Detić, Lucija
University of Zagreb
Faculty of Chemical Engineering and Technology

Institutional repository: Repository of Faculty of Chemical Engineering and Technology University of Zagreb

Cite this document

Detić, L. (2021). Primjena elipsometrije u znanosti i tehnologiji (Undergraduate thesis). Zagreb: University of Zagreb, Faculty of Chemical Engineering and Technology. Retrieved from https://urn.nsk.hr/urn:nbn:hr:149:178431

Detić, Lucija. "Primjena elipsometrije u znanosti i tehnologiji." Undergraduate thesis, University of Zagreb, Faculty of Chemical Engineering and Technology, 2021. https://urn.nsk.hr/urn:nbn:hr:149:178431

Detić, Lucija. "Primjena elipsometrije u znanosti i tehnologiji." Undergraduate thesis, University of Zagreb, Faculty of Chemical Engineering and Technology, 2021. https://urn.nsk.hr/urn:nbn:hr:149:178431

Detić, L. (2021). 'Primjena elipsometrije u znanosti i tehnologiji', Undergraduate thesis, University of Zagreb, Faculty of Chemical Engineering and Technology, accessed 30 December 2024, https://urn.nsk.hr/urn:nbn:hr:149:178431

Detić L. Primjena elipsometrije u znanosti i tehnologiji [Undergraduate thesis]. Zagreb: University of Zagreb, Faculty of Chemical Engineering and Technology; 2021 [cited 2024 December 30] Available at: https://urn.nsk.hr/urn:nbn:hr:149:178431

L. Detić, "Primjena elipsometrije u znanosti i tehnologiji", Undergraduate thesis, University of Zagreb, Faculty of Chemical Engineering and Technology, Zagreb, 2021. Available at: https://urn.nsk.hr/urn:nbn:hr:149:178431

Metadata
TitlePrimjena elipsometrije u znanosti i tehnologiji
Title (english)Application of the ellipsometry in science and technology
AuthorLucija Detić
MentorVladimir Dananić (mentor)
MentorDavor Ristić (komentor)
Committee memberVladimir Dananić (predsjednik povjerenstva)
Committee memberIva Movre Šapić (član povjerenstva)
Committee memberDavor Ristić (član povjerenstva)
GranterUniversity of Zagreb
Faculty of Chemical Engineering and Technology
Zagreb
Defense date and country2021-09-13, Croatia
Scientific / art field,
discipline and subdiscipline		NATURAL SCIENCES
Physics
Abstract
Elipsometrija je optička tehnika koja se koristi za određivanje svojstava površina i tankih filmova. Zasniva se na mjerenju promjene polarizacije nakon refleksije od uzorka i zatim je uspoređuje s modelom. Ova tehnika ima vrlo široku primjenu za karakterizaciju sastava, hrapavosti, debljine, kristalne prirode tvari, električne vodljivosti i određivanje mnogih drugih svojstava tankih filmova. Elipsometrija je vrlo precizna tehnika jer ne mjeri točne vrijednosti, već kompleksan omjer preko kojeg računamo željene vrijednosti. Prilikom izvođenja eksperimenta mjerimo parametre ψ ( amplituda ) i Δ ( fazni pomak) , te ćemo uporabom odgovarajućih jednadžbi, navedenih u ovom radu, odrediti svojstva uzorka. U ovom radu prikazali smo primjenu elipsometrije mjereći amplitudu i fazni pomak na uzorcima silicijeva dioksida i titanijeva dioksida, te smo na temelju tih parametara odredili svojstva filmova.
Abstract (english)
Ellipsometry is an optical technique used to determine the properties of surfaces and thin films. It is based on measuring the changes in polarization after reflection from the sample and then comparing it with the model. This technique has a very wide application for characterization of composition, roughness, thickness, crystal nature of matter, electrical conductivity and determination of many other properties of thin films. Ellipsometry is a very precise technique because it does not measure exact values, but it mesaure a complex ratio through which we calculate the desired values. When performing the experiment of the measurement parameters ψ (amplitude) and Δ (phase shift), using various individual equations that we will bring up in this paper, we can determine the properties of the sample. In this paper, we presented an example of ellipsometry measuring the amplitude and phase shift in a sample of silicon dioxide and titanium dioxide, and based on these parameters we determined the properties of the films.
Keywords
Keywords (english)
Languagecroatian
URN:NBNurn:nbn:hr:149:178431
Study programmeTitle: Materials Science and Engineering - Undergraduate study
Study programme type: university
Study level: undergraduate
Academic / professional title: sveučilišni/a prvostupnik/ prvostupnica (baccalaureus/baccalaurea) inženjer/inženjerka kemijskog inženjerstva (sveučilišni/a prvostupnik/ prvostupnica (baccalaureus/baccalaurea) inženjer/inženjerka kemijskog inženjerstva)
Type of resourceText
File originBorn digital
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Created on2023-03-27 12:09:40