prikaz prve stranice dokumenta Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics
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Scientific paper - Original scientific paper
Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics
Advanced Electronic Materials, 7 (2021), 4; 2001236. https://doi.org/10.1002/aelm.202001236
Hartmann, Florian; Jakešová, Marie; Mao, Guoyong; Nikić, Marta; Kaltenbrunner, Martin; Đerek, Vedran; Głowacki, Eric Daniel

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Hartmann, F., Jakešová, M., Mao, G., Nikić, M., Kaltenbrunner, M., Đerek, V. & Głowacki, E. D. (2021). Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics. Advanced Electronic Materials, 7. (4). doi: 10.1002/aelm.202001236

Hartmann, Florian, et al. "Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics." Advanced Electronic Materials, vol. 7, no. 4, 2021. https://doi.org/10.1002/aelm.202001236

Hartmann, Florian, Marie Jakešová, Guoyong Mao, Marta Nikić, Martin Kaltenbrunner, Vedran Đerek and Eric Daniel Głowacki. "Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics." Advanced Electronic Materials 7, no. 4 (2021). https://doi.org/10.1002/aelm.202001236

Hartmann, F., et al. (2021) 'Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics', Advanced Electronic Materials, 7(4). doi: 10.1002/aelm.202001236

Hartmann F, Jakešová M, Mao G, Nikić M, Kaltenbrunner M, Đerek V, and sur.. Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics. Advanced Electronic Materials [Internet]. 2021 March 15 [cited 2024 July 14];7(4). doi: 10.1002/aelm.202001236

F. Hartmann, et al., "Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics", Advanced Electronic Materials, vol. 7, no. 4, March 2021. [Online]. Available at: https://urn.nsk.hr/urn:nbn:hr:217:878029. [Accessed: 14 July 2024]

Metadata
Title (english)Scalable Microfabrication of Folded Parylene‐Based Conductors for Stretchable Electronics
AuthorFlorian Hartmann
AuthorMarie Jakešová
AuthorGuoyong Mao
AuthorMarta Nikić
AuthorMartin Kaltenbrunner
AuthorVedran Đerek
AuthorEric Daniel Głowacki
Author's institutionUniversity of Zagreb
Faculty of Science
(Department of Physics)
Scientific / art field,
discipline and subdiscipline		NATURAL SCIENCES
Physics
Abstract (english)
Electronics implemented on biocompatible ultrathin substrates like polyethylene terephthalate, polyimide, or parylene enabled a wide range of conformable, lightweight smart wearables and implantables. However, applications in such dynamic environments require robust devices that adjust and stretch while maintaining their functionality. Universal approaches that unite scalable, low-cost fabrication with high performance and versatile, space-efficient design are sparse. Here, stretchable architectures of parylene enabled by Origami-inspired folds at the micrometer scale are demonstrated. Parylene is directly deposited onto anisotropically etched silicon molds to greatly reduce bending stress, allowing folds with bending radii of a few micrometers. 50-nm-thick gold conductors fabricated on the folded parylene facilitate electronics with a stretchability of up to 55% tensile strain. The conductors sustain a resistance below 20 Ω during reversible stretching of more than 10 000 cycles, enabling long-term operation in practical settings. This method presents a versatile tool for the microfabrication of stretchable devices with tunable properties.
Keywords (english)
Languageenglish
Publication typeScientific paper - Original scientific paper
Publication statusPublished
Peer reviewPeer review - international
Publication versionPublished version
Journal titleAdvanced Electronic Materials
Numberingvol. 7, no. 4, 2001236
p-ISSN2199-160X
e-ISSN2199-160X
DOIhttps://doi.org/10.1002/aelm.202001236
URN:NBNurn:nbn:hr:217:878029
Publication2021-03-15
ProjectNumber: UIP-2019-04-1753
Title (croatian): Mikro i nano-strukture za 3D opto-bioelektroniku
Title (english): Micro- and nano-structures for 3D opto-bioelectronics
Acronym: 3Doptobio
Leader: Vedran Đerek
Jurisdiction: Croatia
Funding stream: UIP
Document URLhttps://onlinelibrary.wiley.com/doi/10.1002/aelm.202001236
Type of resourceText
Access conditionsOpen access
Terms of useLicence Attribution 4.0 International (CC BY 4.0) icon
Public note© 2021 The Authors. Advanced Electronic Materials published by Wiley-VCH GmbH. This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited.
Created on2023-07-28 19:09:29